Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers-Reference-Cited by-同舟云学术

Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers

Published:2021-02-23 Issue:9 Volume:13 Page:11224-11236
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Chevalier Xavier¹^ORCID,Gomes Correia Cindy²,Pound-Lana Gwenaelle³,Bézard Philippe³,Sérégé Matthieu³,Petit-Etienne Camille³,Gay Guillaume³,Cunge Gilles³,Cabannes-Boué Benjamin²,Nicolet Célia¹,Navarro Christophe¹,Cayrefourcq Ian¹,Müller Marcus⁴^ORCID,Hadziioannou Georges²,Iliopoulos Ilias⁵,Fleury Guillaume²,Zelsmann Marc³

Affiliation:

1. ARKEMA FRANCE, GRL, Route Nationale 117, BP34 64170 Lacq, France

2. University of Bordeaux, CNRS, Bordeaux INP, LCPO, UMR 5629, F-33600 Pessac, France

3. University of Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, 38000 Grenoble, France

4. Georg-August Universität Göttingen, Institute for Theoretical Physics, 37077 Göttingen, Germany

5. Laboratoire PIMM, Arts et Métiers Institute of Technology, CNRS, Cnam, HESAM Université, 151 Boulevard de l’Hôpital, 75013 Paris, France

Funder

Industrial Chair Arkema/CNRS-ENSAM-Cnam

LabEx Minos

industrial chair ?HOMERIC?

BPI France

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