Development of High-Reflective W/Si-multilayer Diffraction Grating for the Analysis of Fluorine Materials-Reference-Cited by-同舟云学术

Development of High-Reflective W/Si-multilayer Diffraction Grating for the Analysis of Fluorine Materials

Published:2015 Issue:4 Volume:28 Page:531-536
ISSN:0914-9244
Container-title:Journal of Photopolymer Science and Technology
language:en
Short-container-title:J. Photopol. Sci. Technol.

Author:

Kuki Masaki¹,Uemura Tomoyuki²,Yamaguchi Masato¹,Harada Tetsuo¹,Watanabe Takeo¹,Muramatsu Yasuji²,Kinoshita Hiroo¹

Affiliation:

1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo

2. Graduate School of Engineering, University of Hyogo

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Link

https://www.jstage.jst.go.jp/article/photopolymer/28/4/28_531/_pdf

Reference8 articles.

1. 1. Y. Muramatsu, A. Tsueda, T. Harada, and H. Kinoshita, Adv. X-Ray Chem. Anal. Jpn. 43 (2012) 407 (in Japanese).

2. 2. Y. Muramatsu, A. Tsueda, T. Uemura, T. Harada, and H. Kinoshita, Adv. X-Ray Chem. Anal. Jpn. 44 243 (2013) 243 (in Japanese).

3. 3. T. Uemura, Y. Muramatsu, K. Nanbu, T. Harada, and H. Kinoshita, Adv. X-Ray Chem. Anal. Jpn. 45 269 (2014) 269 (in Japanese).

4. 4. T. Uemura, Y. Muramatsu, K. Nanbu, D. Fukuyama, M. Kuki, T. Harada, T. Watanabe, and H. Kinoshita, Adv. X-Ray Chem. Anal. Jpn. 46 (2015) (in Japanese, in printing).

5. 5. K. Emura, T. Watanabe, M. Yamaguchi, H. Tanino, T. Fukui, D. Shiono, Y. Haruyama, Y. Muramatsu, K. Ohmori, K. Sato, T. Harada, and H. Kinoshita, J. Photopolym. Sci. Technol. 27 (2014) 631.

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