Molecular Challenges of Immersion and Extreme Ultraviolet (EUV) Resists
Author:
Affiliation:
1. SEMATECH
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Link
https://www.jstage.jst.go.jp/article/photopolymer/19/4/19_4_487/_pdf
Reference54 articles.
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4. 4. G. Owen, RFW Pease, DA Markle, A. Grenville, RL Hsieh, R. von Bunau, N. Maluf, Journal Vacuum Science Technology B, 10(6), (1992), 3032.
5. 5. M. Switkes, M. Rothschild, Journal Vacuum Science Technology B, 19(6), (2001), 2353.
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