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Conformality of Pb(Zr,Ti)O[sub 3] Films Deposited on Trench Structures Having Submicrometer Diameter and Various Aspect Ratios

  • Published:2006 Issue:1 Volume:9 Page:C15
  • ISSN:1099-0062
  • Container-title:Electrochemical and Solid-State Letters
  • language:en
  • Short-container-title:Electrochem. Solid-State Lett.

Author:

Nagai Atsushi,Minamidate Jun,Asano Gouji,Choi Chel Jong,Cho Choong-Rae,Park Youngsoo,Funakubo Hiroshi

Publisher

The Electrochemical Society

Subject

Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Direct processing of PbZr0.53Ti0.47O3 films on glass and polymeric substrates;Journal of the European Ceramic Society;2020-12

2. Fram Ferroelectric Memories;Ferroelectric Dielectrics Integrated on Silicon;2013-02-27

3. Emerging Memory Concepts;Design Technology for Heterogeneous Embedded Systems;2012

4. Effect of source materials on film thickness and compositional uniformity of MOCVD-P(Zr,Ti)O3 films;Surface and Coatings Technology;2007-09

5. Liquid Injection Atomic Layer Deposition of Pb(Zr,Ti)O3 Thin Films on Three Dimensional Structures;2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics;2007-05
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