The Effects of Dilution Gas and Pressure on the Properties of PE-CVD Low-k Film-Reference-Cited by-同舟云学术

The Effects of Dilution Gas and Pressure on the Properties of PE-CVD Low-k Film

Published:2003 Issue:2 Volume:150 Page:F1
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Shioya Yoshimi,Kotake Yuichiro,Ishimaru Tomomi,Masubuchi Tomoaki,Ikakura Hiroshi,Ohgawara Shouji,Maeda Kazuo

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference15 articles.

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