Atmospheric Pressure Plasma Enhanced CVD of Fe Nanoparticles

Abstract

The results from an experimental study of a new process based on the use of low temperature atmospheric pressure RF (13,56 MHz) plasma generated between coaxial electrodes for synthesis of Fe nanoparticles from pentacarbonyl in He are reported. Two different forms of discharge and conditions of transferring from one to another are considered. The average size of particle is decreased from 20 nm down to 5 nm with an increase of electrical power absorbed between the electrodes in the range of 40-60 W. Influence of plasma parameters and precursor concentration on the rate of particle formation and their size are discussed.