Author:
Hara Nobuyoshi,Mukuhara Shingo,Ohtomo Katsuhisa,Shimizu Yasufumi,Sugimoto Katsuhisa
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference42 articles.
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3. Plasma etching in integrated circuit manufacture—A review
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5. Corrosion of Reactor Wall Surfaces by WF 6
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