Author:
Kim Ja-Yong,Kim Jin-Hyock,Ahn Ji-Hoon,Park Pan-Kwi,Kang Sang-Won
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference18 articles.
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2. Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing
3. M. Ritala and M., Leskala , inHandbook of Thin Film Materials, H. S. Nalwa , Editor, Vol. 1, pp. 103–159, Academic Press, San Diego, CA (2002).
4. Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
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