Mass Spectrometry Study of the Temperature Dependence of Pt Film Growth by Atomic Layer Deposition-Reference-Cited by-同舟云学术

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Mass Spectrometry Study of the Temperature Dependence of Pt Film Growth by Atomic Layer Deposition

Published:2012 Issue:6 Volume:1 Page:P255-P262
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Erkens I. J. M.,Mackus A. J. M.,Knoops H. C. M.,Smits P.,van de Ven T. H. M.,Roozeboom F.,Kessels W. M. M.

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference38 articles.

1. Cross-Reactive Chemical Sensor Arrays

2. Highly sensitive MOSFET gas sensors with porous platinum gate electrode

3. A study of fast response characteristics for hydrogen sensing with platinum FET sensor

4. Modeling and simulation of a MOSFET gas sensor with platinum gate for hydrogen gas detection

5. Improvement and mechanism for the fast response of a Pt/TiO2 gas sensor

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1. In vacuo studies on reaction mechanisms in ALD processes of ruthenium and platinum films;Applied Surface Science;2024-03

2. Nonoxidative dehydrogenation of propane using boron-incorporated silica-supported Pt Sites synthesized by atomic layer deposition;Turkish Journal of Chemistry;2024-02-21

3. Role of the Oxidizing Co-Reactant in Pt Growth by Atomic Layer Deposition Using MeCpPtMe₃ and O₂/O₃/O₂-Plasma;The Journal of Physical Chemistry C;2024-01-31

4. Surface Chemistry during Atomic Layer Deposition of Pt Studied with Vibrational Sum-Frequency Generation;The Journal of Physical Chemistry C;2022-01-31

5. ToF-SIMS Investigation of the Initial Stages of MeCpPt(CH3)3 Adsorption and Decomposition on Nickel Oxide Surfaces: Exploring the Role and Location of the Ligands;Organometallics;2020-02-03

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