Author:
Huo J.,Solanki R.,McAndrew J.
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering
Reference11 articles.
1. J. Huo, R. Solanki, and J. McAndrew, in
Proceedings of the 22nd Heat Treating Society Conference and the 2nd International Surface Engineering Congress
, p. 389, Indianapolis, IN (2003).
2. J. Huo, Ph.D. Dissertation, Oregon Health and Science University, Portland, OR (2003).
3. Study of anodic layers and their effects on electropolishing of bulk and electroplated films of copper
4. Planarization of Copper Thin Films by Electropolishing in Phosphoric Acid for ULSI Applications
5. Pattern Effects on Planarization Efficiency of Cu Electropolishing
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