Author:
Carter Melvin Keith,Small Robert
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
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2. S. Wolf and R. N. Tauber,Silicon Processing for the VLSI Era, p. 742, Lattice Press, Sunset Beach, CA (2000).
3. L. Bonneau, J. C. Drouget, M. Peterson, R. Small, and T. Troung, U.S. Pat. 6,251,150 (2001).
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