Affiliation:
1. Tektronix, Incorporated, Beaverton, Oregon 97077
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
6 articles.
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1. Intrinsic gettering of Czochralski silicon annealed in argon and nitrogen atmosphere;Physica B: Condensed Matter;2001-12
2. Diffusion;Fundamentals of Semiconductor Processing Technology;1995
3. Gettering in silicon;Journal of Applied Physics;1989-04-15
4. Intrinsic Gettering of RIE Damage on Silicon Studied by Scanning DLTS and EBIC Methods;Japanese Journal of Applied Physics;1987-07-20
5. Argon ion implantation gettering of large area p-n junctions and schottky diodes;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1985-01