Amorphous Hydrogenated Silicon Films for Solar Cell Application Obtained with 55 kHz Plasma Enhanced Chemical Vapor Deposition-Reference-Cited by-同舟云学术

Amorphous Hydrogenated Silicon Films for Solar Cell Application Obtained with 55 kHz Plasma Enhanced Chemical Vapor Deposition

Published:1998-07-01 Issue:7 Volume:145 Page:2508-2512
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Budaguan B. G.¹,Sherchenkov A. A.¹,Stryahilev D. A.¹,Sazonov A. Y.¹,Radosel'sky A. G.¹,Chernomordic V. D.²,Popov A. A.²,Metselaar J. W.³

Affiliation:

1. Moscow Institute of Electronic Technology, Moscow 103498, Russia

2. Institute of Microelectronics, Russian Academy of Sciences, Yaroslavl' 150007, Russia

3. Faculty of Information Technology and Systems, Delft University of Technology, 2628 CD Delft, The Netherlands

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.1838669/pdf

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