Affiliation:
1. Fairchild Camera and Instrument Corporation, Palo Alto, California 94304
2. Institute for Applied Solid State Physics of the Fraunhofer Society, 7800 Freiburg, Germany
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
40 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Brief Introduction of Thermal Oxidation Technology;2019 China Semiconductor Technology International Conference (CSTIC);2019-03
2. Silicon–Insulator Interface Barriers;Internal Photoemission Spectroscopy;2014
3. References;Internal Photoemission Spectroscopy;2008
4. Halogens;Computational Microelectronics;2004
5. Application of neural fuzzy network to pyrometer correction and temperature control in rapid thermal processing;IEEE Transactions on Fuzzy Systems;1999-04