Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
31 articles.
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1. Lithography for High Energy Technology in Microelectronics;High Energy Density Technologies in Materials Science;1990
2. Negative Radiation Resists;Semiconductor Lithography;1988
3. Lithographic Materials;Methods and Materials in Microelectronic Technology;1984
4. Electron beam lithography;Contemporary Physics;1981-05
5. Electron-beam processes;Electron-Beam Technology in Microelectronic Fabrication;1980