Abstract
The article reviews most published inertial sensor technologies, including dynamically tuned, optical, MEMS vibratory, mechanical, solid-state, and fluid-based. The working principles of the technologies are elaborated. Also, the advantages and disadvantages of those sensors are laid out. Owing to its excellent overall performance, such as its simple structure, low cost, large measurement range, etc, the current review focuses on the state-of-the-art of fluid-based technology of accelerometers and gyroscopes. The sensing elements of the fluid-based technology that are used in the accelerometer and gyroscope are explained. Moreover, a comparison and analysis of those sensing elements are presented. The comparison shows that the thermal resistor has five orders of magnitude which is the highest dynamic range. However, the porous transducer is higher in bandwidth which is almost 120 Hz. Furthermore, the particle imaging velocimetry gyroscope (PIVG) is reviewed. The PIVG is an innovative technology that is used to measure the angular rate where fluid is used as proof of mass. The review shows that the PIVG is low-cost and almost drift-free. Additionally, compared to commercially available gyroscopes, PIVG provides a superior signal-to-noise ratio (SNR).
Publisher
The Electrochemical Society
Cited by
5 articles.
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