Single- and Multi-Directional Slanted Plasma Etching of Silicon under Practical Plasma Processing Conditions
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Near-infrared Yablonovite-like photonic crystals by focused-ion-beam etching of macroporous silicon
2. Direct laser writing and characterization of “Slanted Pore” Photonic Crystals
3. Compact slanted grating couplers
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5. A nontransferring dry adhesive with hierarchical polymer nanohairs
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