Author:
Matsuda Takayuki,Takahashi Hideaki,Tsurugaya Muneaki,Miyazaki Kuon,Doy Toshiroh K.,Kinoshita Masaki
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference6 articles.
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4. Abrasive-Free Polishing for Copper Damascene Interconnection
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