Affiliation:
1. Semiconductor Technology Laboratory, Oki Electric Industry Company, Limited, 550‐5 Higashiasakawa‐cho, Hachioji‐shi, Tokyo 193, Japan
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
14 articles.
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1. Chemical Etching and Patterning of Copper, Silver, and Gold Films at Low Temperatures;ECS Journal of Solid State Science and Technology;2014-10-29
2. Metallization;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22
3. Wet and Dry Etching Materials;Handbook of Chemicals and Gases for the Semiconductor Industry;2002-07-15
4. High throughput, high quality dry etching of copper/barrier film stacks;Microelectronic Engineering;2000-01
5. Performance of vertical power devices with contact-level copper metallization;Thin Solid Films;1999-07