Author:
Matsunaga S.,Yoshida S.,Kawaji T.,Inada T.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
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5. Nitrogen implantation in (100)‐β‐SiC layers grown on Si substrate
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