Author:
Nilson R. H.,Griffiths S. K.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference34 articles.
1. Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization, P. C. Andricacos, J. O. Dukovic, G. S. Mathad, G. M. Oleszek, H. S. Rathore, C. Reidsema-Simpson, D. D. Snyder, and R. K. Ulrich, Editors, PV 98-6, The Electrochemical Society Proceedings Series, Pennington, NJ (1998).
2. Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics
3. Stokes flow in arbitrary two-dimensional domains: shear flow over ridges and cavities
4. Etching: a two-dimensional mathematical approach
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献