Functionalized Back-End Devices for (Bi)CMOS Circuits

Abstract

The integration of various functionality to (Bi)CMOS circuits is in the focus of the "More than Moore" approach. Here, we demonstrate the incorporation of surface acoustic wave (SAW) devices as well as of nonvolatile memories (NVM) into the Back end of line (BEOL) of Bi(CMOS) circuits. The added functionalities open new technological possibilities for high value microelectronics systems.