Author:
Yoo Woo Sik,Ueda Takeshi,Ishigaki Toshikazu,Kang Kitaek,Fukumoto Masashi,Hasuike Noriyuki,Harima Hiroshi,Yoshimoto Masahiro
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference36 articles.
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4. Crystal Damage Removal by Spike and Flash Annealing
5. Millisecond Annealing Junctions for Near-Scaling-Limit Bulk CMOS Using Raised Source/Drain Extensions
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