Effect of ZnO-SiO2 Composite Abrasive on Sapphire Polishing Performance and Mechanism Analysis-Reference-Cited by-同舟云学术

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Effect of ZnO-SiO2 Composite Abrasive on Sapphire Polishing Performance and Mechanism Analysis

Published:2021-10-01 Issue:10 Volume:10 Page:104001
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Hou Ziyang,Niu Xinhuan^ORCID,Lu Yanan,Zhang Yinchan,Zhu Yebo

Funder

Natural Science Foundation of Tianjin China

Major National Science and Technology Special Projects

Natural Science Foundation of Hebei Province, China

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/2162-8777/ac2910/pdf

Reference43 articles.

1. Nd 3+ -doped colloidal SiO 2 composite abrasives: Synthesis and the effects on chemical mechanical polishing (CMP) performances of sapphire wafers

2. Removal mechanism of sapphire substrates (0001, 112¯0 and 101¯0) in mechanical planarization machining

3. Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces

4. Evolution of material removal modes of sapphire under varied scratching depths

5. Influence of loading rate on nanohardness of sapphire

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1. Exploring the effectiveness of polyhydroxy complexing agents in sapphire chemical mechanical polishing: Combining experiments and theoretical calculation;Tribology International;2024-11

2. Chemical-mechanical synergies effects of multi-purpose pH regulators on C-, A-, and R-plane sapphire polishing;Tribology International;2024-07

3. Influence of SiO2–ZnO mixed soft abrasive on tribological behavior and polishing performance of sapphire wafer;Materials Science in Semiconductor Processing;2024-06

4. Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations;Materials Chemistry and Physics;2024-04

5. Macro and micro-nano machining mechanism for ultrasonic vibration assisted chemical mechanical polishing of sapphire;Applied Surface Science;2023-12

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