Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations-Reference-Cited by-同舟云学术

Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations

Published:2024-04 Issue: Volume:316 Page:129066
ISSN:0254-0584
Container-title:Materials Chemistry and Physics
language:en
Short-container-title:Materials Chemistry and Physics

Author:

Zou Yida,Niu Xinhuan^ORCID,Zhan Ni,Liu Jianghao,Li Xinjie,He Chao,Dong Changxin,Zhou Jianwei

Publisher

Elsevier BV

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