Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP-Reference-Cited by-同舟云学术

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Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP

Published:2018-08 Issue: Volume:130-131 Page:12-19
ISSN:0890-6955
Container-title:International Journal of Machine Tools and Manufacture
language:en
Short-container-title:International Journal of Machine Tools and Manufacture

Author:

Xu Yongchao,Lu Jing,Xu Xipeng,Chen Chao-Chang A.,Lin Yujing

Funder

National Natural Science Foundation of China

Xiamen Science and Technology Project

Open Research Fund Program of Shanxi Key Laboratory

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference33 articles.

1. Grinding forces in micro slot-grinding (MSG) of single crystal sapphire;Cheng;Int. J. Mach. Tool Manufact.,2017

2. Enhanced transmittance of sapphire by silicon oxynitride thin films annealed at high temperatures;Loka;Mater. Lett.,2017

3. Modeling the dependency of edge chipping size on the material properties and cutting force for rotary ultrasonic drilling of brittle materials;Wang;Int. J. Mach. Tool Manufact.,2016

4. AFM characterization of patterned sapphire substrate with dense cone arrays: image artifacts and tip-cone convolution effect;Shen;Appl. Surf. Sci.,2018

5. Fabrication of nano-cavity patterned sapphire substrate using self-assembly meshed Pt thin film on c-plane sapphire substrate;Huang;Thin Solid Films,2017

Cited by 64 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterization of ultrasonic vibration and polishing force in sapphire ultrasonic vibration-assisted flexible polishing: Insights from in-situ monitoring systems;Ultrasonics;2025-01

2. Subsurface damage in sapphire ultra-precision grinding;Journal of Manufacturing Processes;2024-11

3. Effect of laser-assisted heat treatment on material removal behavior of sapphire in indentation and scratching;Materials Science in Semiconductor Processing;2024-10

4. Study on the polishing performance and mechanism of sapphire wafers by different types of degradable surfactants;Surfaces and Interfaces;2024-09

5. Data-based systematic error extraction and compensation methods based on wavelet transform in ultra-precision optical polishing;Optics Letters;2024-07-26

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