AFM characterization of patterned sapphire substrate with dense cone arrays: Image artifacts and tip-cone convolution effect-Reference-Cited by-同舟云学术

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AFM characterization of patterned sapphire substrate with dense cone arrays: Image artifacts and tip-cone convolution effect

Published:2018-03 Issue: Volume:433 Page:358-366
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Shen Jian,Zhang Dan,Zhang Fei-Hu,Gan Yang

Funder

National Natural Science Foundation of China

National Key R&D Program of China

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference24 articles.

1. Advances in the atomic force microscopy for critical dimension metrology;Hussain;Meas. Sci. Technol.,2016

2. AFM and SEM study on crystallographic and topographical evolution of wet-etched patterned sapphire substrates (PSS) I. Cone-shaped PSS etched in sulfuric acid and phosphoric acid mixture (3:1) at 230°C;Shen;ECS J. Solid State Sci. Technol.,2017

3. Fabrication mechanism for patterned sapphire substrates by wet etching;Aota;ECS J. Solid State Sci. Technol.,2014

4. GaN-based light-emitting diodes on various substrates: a critical review;Li;Rep. Prog. Phys.,2016

5. Advantages of the moth-eye patterned sapphire substrate for the high performance nitride based LEDs;Kondo;Phys. Status Solidi,2014

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