A MEMS Based Fourier Transform Spectrometer and Its Scan Stability Study-Reference-Cited by-同舟云学术

A MEMS Based Fourier Transform Spectrometer and Its Scan Stability Study

Published:2018 Issue:7 Volume:7 Page:Q3025-Q3031
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Chai Junyu^ORCID,Jia Hongzhi^ORCID,Wang Donglin,Liu Hongqiong,Chen Qiao,Xie Huikai

Funder

Wuxi Municipal Science and Technology Department

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Wang W. Chen J. Tanguy Q. A. Xie H. , International Conference on Optical Mems & Nanophotonics (IEEE OMN), Singapore, Singapore, pp. 1. 31 July- 4 Aug (2016).

2. Emerging digital micromirror device (DMD) applications

3. Micromachined Fourier transform spectrometer on silicon optical bench platform

4. Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation

5. Lamellar grating optimization for miniaturized fourier transform spectrometers

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling and simulation of the control system for the plane mirror rotating interferometer;Engineering Reports;2024-06-14

2. A miniature Fourier transform spectrometer based on an electrothermal MEMS mirror with asynchronous calibration;AOPC 2023: Optical Spectroscopy and Imaging; and Atmospheric and Environmental Optics;2023-12-18

3. Non-resonant MOEMS mirror for laser cavity-length tuning;MOEMS and Miniaturized Systems XXII;2023-03-15

4. Stabilized control of electromagnetic micro-mirror;2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO);2021-08-02

5. Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers;Micromachines;2020-09-23