A Combination of Metal Assisted Photochemical and Photoelectrochemical Etching for Tailored Porosification of 4H SiC Substrates

Author:

Leitgeb Markus,Zellner Christopher,Schneider Michael,Schmid Ulrich

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Newby P. , Fabrication of porous semiconductors for improved thermal insulation in MEMS, INSA de Lyon - PhD Thesis (2013).

2. Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application

3. Shields V. R. Ryan M. A. Williams R. M. Spencer M. G. Collins D. M. Zhang D. , Editors, A Variable Potential Porous Silicon Carbide Hydrocarbon Gas Sensor, IOP Publishing (1996).

4. Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications

5. Porous Silicon Carbide as a Membrane for Implantable Biosensors

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