Surface Morphology Evolution Induced by Multiple Femtosecond Laser Ablation on 4H-SiC Substrate and Its Application to CMP
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference41 articles.
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4. Generation of regular femtosecond pulses in AlGaInP semiconductor laser
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1. Laser Applications in Ceramic and Metal Joining: A Review;Metals and Materials International;2024-02-06
2. Experimental study on femtosecond laser ablation of 4H–SiC substrate;Journal of Micromechanics and Microengineering;2024-01-19
3. Picosecond laser-induced evolution of processing properties of 4H–SiC;Optical Materials;2023-12
4. Defect-Engineered MnO2 as Catalyst for the Chemical Mechanical Polishing of Silicon Carbide Wafer;ECS Journal of Solid State Science and Technology;2023-07-01
5. Femtosecond laser nanostructuring on a 4H-SiC surface by tailoring the induced self-assembled nanogratings;Optics Express;2022-01-18
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