Fabrication of Complex Micro/Nanopatterns on Semiconductors by the Multi-beam Interference of Femtosecond Laser
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Published:2014
Issue:
Volume:56
Page:1059-1065
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ISSN:1875-3892
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Container-title:Physics Procedia
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language:en
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Short-container-title:Physics Procedia
Author:
Jia Xin,Dong Lingling
Subject
General Engineering
Cited by
8 articles.
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