Affiliation:
1. Bell Laboratories, Murray Hill, New Jersey 07974
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
7 articles.
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1. Wet chemical etching of silicate glasses in hydrofluoric acid based solutions;Journal of Materials Science;1993-12
2. References;Thin Films by Chemical Vapour Deposition;1990
3. Dielectric Materials;Microelectronic Materials and Processes;1989
4. LPCVD of Borophosphosilicate Glass from Organic Reactants;Journal of The Electrochemical Society;1987-03-01
5. Low Pressure Deposition of Phosphosilicate Glass Films;Journal of The Electrochemical Society;1982-07-01