Two‐Dimensional Wafer‐Scale Chemical Mechanical Planarization Models Based on Lubrication Theory and Mass Transport-Reference-Cited by-同舟云学术

Two‐Dimensional Wafer‐Scale Chemical Mechanical Planarization Models Based on Lubrication Theory and Mass Transport

Published:1999-02-01 Issue:2 Volume:146 Page:761-766
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Sundararajan Srikanth¹²,Thakurta Dipto G.¹²,Schwendeman Donald W.³,Murarka Shyam P.²⁴,Gill William N.¹²

Affiliation:

1. Department of Chemical Engineering

2. Center for Integrated Electronics and Electronic Manufacturing

3. Department of Mathematical Sciences

4. Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, Troy, New York 12180, United States of America

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.1391678/pdf

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