Author:
Vlahakis J.,Manno V. P.,Rogers C. B.,White R.
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering
Reference10 articles.
1. Colloid aspects of chemical–mechanical planarization
2. Effect of Pad Groove Designs on the Frictional and Removal Rate Characteristics of ILD CMP
3. C. Barnes , Personal communication.
4. J. P. Den Hartog ,
Mechanical Vibration
, McGraw-Hill, New York (1956).
5. A. Z. Szeri ,
Fluid Film Lubrication: Theory and Design
, Cambridge University Press, New York (1998).
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献