Subject
Colloid and Surface Chemistry,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials
Reference119 articles.
1. Chemical–Mechanical Polishing 2001: Advances and Future Challenges,2001
2. Chemical–Mechanical Planarization: 2002,2002
3. Chemical mechanical planarization for microelectronics applications
4. Fundamentals of Microfabrication: The Science of Miniaturization;Madou,2002
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