Comparative Study of Trimethyl Silane and Tetramethylcyclotetrasiloxane-Based Low-k Films-Reference-Cited by-同舟云学术

Comparative Study of Trimethyl Silane and Tetramethylcyclotetrasiloxane-Based Low-k Films

Published:2005 Issue:4 Volume:152 Page:G246
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Widodo J.,Goh L. N.,Lu W.,Mhaisalkar S. G.,Zeng K. Y.,Hsia L. C.

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference21 articles.

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