Low Temperature CVD of Pb(Zr,Ti)O[sub 3] Using Pb(tmhd)[sub 2], Zr(dmae)[sub 4], and Ti(dmae)[sub 4]-Reference-Cited by-同舟云学术

Low Temperature CVD of Pb(Zr,Ti)O[sub 3] Using Pb(tmhd)[sub 2], Zr(dmae)[sub 4], and Ti(dmae)[sub 4]

Published:2003 Issue:8 Volume:150 Page:C516
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Kim Dae-Hwan,Yang Woo-Young,Rhee Shi-Woo

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Ferroelectric Memories

2. Chemical vapor deposition of barium strontium titanate thin films using direct liquid injection of a single cocktail solution with Ba(methd)2, Sr(methd)2, and Ti(MPD)(tmhd)2

3. Precursors for Deposition of Strontium Bismuth Tantalate Films by Direct Liquid Injection-Metallorganic Chemical Vapor Deposition

4. Low-Temperature Fabrication of Ir/Pb(Zr,Ti)O3/Ir Capacitors Solely by Metalorganic Chemical Vapor Deposition

5. Low Temperature Deposition of Pb(Zr,Ti)O3 Film by Source Gas Pulse-Introduced Metalorganic Chemical Vapor Deposition

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1. Synthesis and characterization of lead (IV) precursors and their conversion to PZT materials through a CVD process;Polyhedron;2020-02

2. Metallic Materials Deposition: Metal-Organic PrecursorsBased in part on the article Metallic Materials Deposition: Metal-Organic Precursors by Herbert D. Kaesz, Alfred Zinn, & Lutz Brandt which appeared in theEncyclopedia of Inorganic Chemistry, First Edition.;Encyclopedia of Inorganic and Bioinorganic Chemistry;2011-12-15

3. Oxides, Oxides, and More Oxides: High-κ Oxides, Ferroelectrics, Ferromagnetics, and Multiferroics;Critical Reviews in Solid State and Materials Sciences;2009-11-30

4. Processing, Structure, Properties, and Applications of PZT Thin Films;Critical Reviews in Solid State and Materials Sciences;2007-12-04

5. Metallic Materials Deposition: Metal-Organic PrecursorsBased in part on the article Metallic Materials Deposition: Metal-Organic Precursors by Herbert D. Kaesz, Alfred Zinn, & Lutz Brandt which appeared in theEncyclopedia of Inorganic Chemistry, First Edition.;Encyclopedia of Inorganic Chemistry;2006-03-15