Author:
Ono Toshiaki,Sugimura Wataru,Kihara Takayuki,Hourai Masataka
Abstract
Dependence of mechanical strength of large diameter wafers as a function of impurity concentration and density of oxide precipitates has been studied in terms of brittle fracture and slip dislocation propagation.
Publisher
The Electrochemical Society
Cited by
5 articles.
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