Metalcone and Metalcone/Metal Oxide Alloys Grown Using Atomic and Molecular Layer Deposition

Abstract

Atomic and molecular layer deposition (ALD & MLD) techniques can be used to fabricate various hybrid organic-inorganic polymer films. One class of hybrid organic-inorganic films are metal alkoxide polymers that are formed from organometallic precursors and organic alcohols. These metal alkoxide polymers are called "metalcones". The metalcones can also be mixed with metal oxides to grow metalcone/metal oxide alloys. This paper will overview some of the new metalcones and metalcone/metal oxide alloys that can be grown and some of their properties. Zircone MLD films were grown using zirconium tert-butoxide (ZTB) and ethylene glycol (EG) at 145°C. Alucone alloy films were grown by combining Al2O3 ALD and alucone MLD at 135°C. Zircone alloy films also were fabricated by combining ZrO2 ALD and zircone MLD at 145°C. These new materials offer a tool set for engineering the functional properties of thin films.