Neural Network Modeling of Growth Processes-Reference-Cited by-同舟云学术

Neural Network Modeling of Growth Processes

Published:2002 Issue:2 Volume:149 Page:G137
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Venkateswaran S.,Rai M. M.,Govindan T. R.,Meyyappan M.

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Process Control, Diagnostics, and Modeling on Semiconductor Manufacturing, M. Meyyappan, D. Economou, and S. W. Butler, Editors, PV 97-9, The Electrochemical Society Proceedings Series, Pennington, NJ (1997).

2. J. Card, D. Sniderman, and C. Klimasaukas, inProcess Control, Diagnostics, and Modeling on Semiconductor Manufacturing, M. Meyyappan, D. Economou, and S. W. Butler, Editors, PV 97-9, p. 19, The Electrochemical Society Proceedings Series, Pennington, NJ (1997).

3. D. Sniderman, J. P. Card, and C. Klimasaukas, inProcess Control, Diagnostics, and Modeling on Semiconductor Manufacturing, M. Meyyappan, D. Economou, and S. W. Butler, Editors, PV 97-9, p. 28, The Electrochemical Society Proceedings Series, Pennington, NJ (1997).

4. M. S. Le, T. H. Smith, D. S. Boning, and H. H. Sawin, inProcess Control, Diagnostics, and Modeling on Semiconductor Manufacturing, M. Meyyappan, D. Economou, and S. W. Butler, Editors, PV 97-9, p. 3, The Electrochemical Society, Proceedings Series, Pennington, NJ (1997).

5. Computational Modeling in Semiconductor Processing, M. Meyyappan, Editor, Artech House, Boston (1995).

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