Silicon Molecular Layer Epitaxy-Reference-Cited by-同舟云学术

Silicon Molecular Layer Epitaxy

Published:1990-06-01 Issue:6 Volume:137 Page:1898-1904
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Nishizawa Jun‐ichi¹²³,Aoki Kenji¹²³,Suzuki Sohbe¹²³,Kikuchi Kazuhiko¹²³

Affiliation:

1. Research Institute of Electrical Communication, Tohoku University, 2‐1‐1‐ Katahira, Sendai 980, Japan and Exploratory Research for Advanced Technology, Nishizawa Perfect Crystal Project, Research Development Corporation of Japan. Semiconductor Research Institute, Kawauchi, Sendai 980, Japan

2. Exploratory Research for Advanced Technology, Nishizawa Perfect Crystal Project, Research Development Corporation of Japan, Semiconductor Research Institute, Kawauchi, Sendai 980, Japan

3. Semiconductor Research Institute, Kawauchi, Sendai 980, Japan

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2086827/pdf

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