Silicon Molecular Layer Epitaxy

Author:

Nishizawa Jun‐ichi123,Aoki Kenji123,Suzuki Sohbe123,Kikuchi Kazuhiko123

Affiliation:

1. Research Institute of Electrical Communication, Tohoku University, 2‐1‐1‐ Katahira, Sendai 980, Japan and Exploratory Research for Advanced Technology, Nishizawa Perfect Crystal Project, Research Development Corporation of Japan. Semiconductor Research Institute, Kawauchi, Sendai 980, Japan

2. Exploratory Research for Advanced Technology, Nishizawa Perfect Crystal Project, Research Development Corporation of Japan, Semiconductor Research Institute, Kawauchi, Sendai 980, Japan

3. Semiconductor Research Institute, Kawauchi, Sendai 980, Japan

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

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