Drive Current Enhancement in Sub-50 nm CMOS by Reduction of SDE Resistance with Laser Thermal Process-Reference-Cited by-同舟云学术

Drive Current Enhancement in Sub-50 nm CMOS by Reduction of SDE Resistance with Laser Thermal Process

Published:2004 Issue:12 Volume:151 Page:G895
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Yamamoto Tomonari,Goto Ken-ichi,Kubo Tomohiro,Wang Yun,Lin Tim,Talwar Somit,Kase Masataka,Sugii Toshihiro

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference15 articles.

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