Author:
Ragnarsson Lars-Åke,Brunco David P.,Yamamoto Kazuhiko,Tökei Zsolt,Pourtois Geoffrey,Delabie Annelies,Parmentier Brigitte,Conard Thierry,Roussel Philippe,De Gendt Stefan,Heyns Marc M.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference32 articles.
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2. Electrical characteristics of 8-/spl Aring/ EOT HfO/sub 2//TaN low thermal-budget n-channel FETs with solid-phase epitaxially regrown junctions
3. Room temperature interactions of water vapor with HfO2 films on Si
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