Abstract
Electrochemical micromachining (ECM) is a highly flexible technology allowing for accurate fabrication of both simple microstructures (e.g. macropores, microtips, spirals) and complex microsystems (e.g. microgrippers, microneedles) in silicon at low cost, in any lab. In this paper main advantages and drawbacks of ECM technology are discussed, also with respect to standard leading micromachining technology, and future directions for ECM advance are given.
Publisher
The Electrochemical Society
Cited by
3 articles.
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