1. Effects of Amine Fluoride Cleaning Chemistry on Metallic Aluminum Integrated Circuit Films
2. S. W. Benson,The Foundations of Chemical Kinetics, Chap. III, McGraw-Hill Book Co., Inc., New York (1960).
3. G. N. Lewis, M. Randal, K. S. Pitzer, and L. Brewer,Thermodynamics, 2nd ed., p. 75, McGraw-Hill Book Co., Inc., New York (1961).
4. S. W. Benson,The Foundations of Chemical Kinetics, p. 17, McGraw-Hill Book Co., Inc., New York (1960).
5. S. W. Benson,The Foundations of Chemical Kinetics, pp. 73-75, McGraw-Hill Book Co., Inc., New York (1960).