Affiliation:
1. Fraunhofer‐Institut für Festkörpertechnologie, 8000 München 60, Germany
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
12 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. MEMS Wet-Etch Processes and Procedures;MEMS Reference Shelf;2011
2. The Copper Damascene Process and Chemical Mechanical Polishing;Copper Interconnect Technology;2009
3. References;Thin Films by Chemical Vapour Deposition;1990
4. Nonresist Processes;Semiconductor Lithography;1988
5. Subtractive Etching;Semiconductor Lithography;1988