Non-Traditional Cell Geometry for Improved Copper Plating Uniformity

Author:

Garich Holly,Shimpalee Sirivatch,Lilavivat Visarn,Snyder Stephen,Taylor E. J.ORCID

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. U.S. Pat. No. 5,516,412, Vertical Paddle Plating Cell, May 14th, 1996.

2. Gebhart L.E. Sun J. J. Miller P. O. Taylor E. J. , Electroplating Cell with Hydrodynamics Facilitating More Uniform Deposition across a Workpiece during Plating, U.S. Pat. 7,553,401, June 30, 2009.

3. Gebhart L. E. Taylor E. J. , Method of Operating an Electroplating Cell with Hydrodynamics Facilitating More Uniform Deposition on a Workpiece with Through Holes, U.S. Pat. 7,947,161, May 24, 2011.

4. Gebhart L. E. Taylor E. J. , Electroplating Cell with Hydrodynamics Facilitating More Uniform Deposition on a Workpiece with Through Holes during Plating, U.S. Pat. 8,226,804, July 24, 2012.

5. Gebhart L. E. Sun J. J. Miller P. O. Taylor E. J. , Electroplating Cell with Hydrodynamics Facilitating More Uniform Deposition across a Workpiece during Plating, U.S. Pat. 8,329,006, December 11, 2012.

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