Author:
Bryce George,Severi Simone,Du Bois Bert,Willegems Myriam,Claes Gert,Van Hoof Rita,Haspeslagh Luc,Decoutere Stefaan,Witvrouw Ann
Publisher
The Electrochemical Society
Cited by
14 articles.
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1. Thin films on silicon;Handbook of Silicon Based MEMS Materials and Technologies;2020
2. Thin Films on Silicon;Handbook of Silicon Based MEMS Materials and Technologies;2015
3. Influence of germanium incorporation on the structural and electrical properties of boron-doped ultrathin poly-Si1−x Ge x films deposited by chemical vapour deposition;Applied Physics A;2013-11-20
4. Poly-SiGe as Piezoresistive Material;Poly-SiGe for MEMS-above-CMOS Sensors;2013-07-18
5. Introduction;Poly-SiGe for MEMS-above-CMOS Sensors;2013-07-18