Correlating Coefficient of Friction and Shear Force to Platen Motor Current in Tungsten and Interlayer Dielectric Chemical Mechanical Planarization at Highly Non-Steady-State Conditions-Reference-Cited by-同舟云学术

Correlating Coefficient of Friction and Shear Force to Platen Motor Current in Tungsten and Interlayer Dielectric Chemical Mechanical Planarization at Highly Non-Steady-State Conditions

Published:2019 Issue:10 Volume:8 Page:P634-P645
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Headley R.^ORCID,Frank C.^ORCID,Sampurno Y.^ORCID,Philipossian A.

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference64 articles.

1. Ultra-Rapid Determination of Material Removal Rates Based Solely on Tribological Data in Chemical Mechanical Planarization

2. Effect of Conditioning and Slurry Application Method on Silicon Dioxide Removal Rates Using a Ceria-Based Chemical Mechanical Planarization Slurry

3. An Approach for Correlating Friction Force and Removal Rate to Pad Topography during Tungsten Chemical Mechanical Planarization

4. Fundamental Tribological and Removal Rate Studies of Inter-Layer Dielectric Chemical Mechanical Planarization

5. Bhushan B. , Introduction to Tribology. John Wiley & Sons (2013).

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