Atomic Layer Deposition and Properties of HfO2-Al2O3 Nanolaminates-Reference-Cited by-同舟云学术

Atomic Layer Deposition and Properties of HfO2-Al2O3 Nanolaminates

Published:2018 Issue:9 Volume:7 Page:P501-P508
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Kukli Kaupo^ORCID,Kemell Marianna^ORCID,Castán Helena^ORCID,Dueñas Salvador^ORCID,Seemen Helina^ORCID,Rähn Mihkel,Link Joosep,Stern Raivo^ORCID,Ritala Mikko^ORCID,Leskelä Markku

Funder

European Regional Development Fund Project

Spanish Ministry of Economy and Competitiveness

Eesti Teadusagentuur (Estonian Research Council)

Eesti Teaduste Akadeemia (Estonian Academy of Sciences)

Finnish Centre of Excellence in Atomic Layer Deposition

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference45 articles.

1. Initial leakage current related to extrinsic breakdown in HfO2/Al2O3 nanolaminate ALD dielectrics

2. Microstructure and interfacial properties of HfO2–Al2O3 nanolaminate films

3. Electrical characterization of high-k based metal-insulator-semiconductor structures with negative resistance effect when using Al2O3 and nanolaminated films deposited on p-Si

4. Electrical characteristics of metal-insulator-semiconductor structures with atomic layer deposited Al2O3, HfO2, and nanolaminates on different silicon substrates

5. Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication and characterization of HfxAl(1-x)Oy ceramic targets and thin films by RF sputtering;Ceramics International;2024-09

2. Layer‐Engineered Functional Multilayer Thin‐Film Structures and Interfaces through Atomic and Molecular Layer Deposition;Advanced Materials Interfaces;2024-06-28

3. Neuromorphic Vision Sensor driven by Ferroelectric HfAlO;Materials Today Nano;2024-06

4. Hafnium Aluminate–Polymer Bilayer Dielectrics for Organic Light-Emitting Transistors (OLETs);ACS Applied Electronic Materials;2024-02-02

5. Rapid thermal processing induced interfacial diffusion and solid reaction in the Al2O3/ZnO nano-laminates films;Ceramics International;2024-02